发明名称 WATER JET MACHINING METHOD AND SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide water jet machining method and system in which a nozzle for jetting machining water mixed with abrasive particles can be used for a long time. SOLUTION: In the water jet machining method where a work held by a work holding mechanism is cut by jetting machining water mixed with abrasive particles from the nozzle of a water jetting means, interval between the nozzle and the work is decreased such that the machining water has a specified spot diameter when the spot diameter of the machining water being jetted from the nozzle to the work exceeds the specified value. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004259938(A) 申请公布日期 2004.09.16
申请号 JP20030049091 申请日期 2003.02.26
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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