摘要 |
PROBLEM TO BE SOLVED: To provide an alternative method for measuring a change of capacity in an electrostatic capacity sensor. SOLUTION: In this sensor comprising an array of conductive plates 2, 2' constituted to form an electrostatic coupling C<SB>i,j</SB>as a function of detecting objective media 3, 5, and a plurality of sensor circuit devices U<SB>i,j</SB>related to the conductive plates, each of the sensor circuit devices includes an inverter I<SB>i,j</SB>, a time constant t<SB>i,j</SB>is shown as the function of the objective media detected by the conductive plates 2, 2', and the sensor circuit devices are connected each other inside a ring oscillator oscillated by a frequency depending on the time constants of the circuit devices. COPYRIGHT: (C)2004,JPO&NCIPI |