| 摘要 |
PROBLEM TO BE SOLVED: To provide a system with which software is provided simply and securably from a software providing device 21 to controllers C1-C4 for performing a process regarding semiconductor equipment H1-H4 via a communication line 3 using the software. SOLUTION: Information for capturing software K corresponding to each software provided by the software providing device is arranged. The controller transmits the information for capturing the software corresponding to the software requesting to be provided, to the software providing device via the communication line. The software providing device transmits to the controller the software corresponding to the information for capturing the software received. The controller stores the software received, and the process is executed using the software stored. COPYRIGHT: (C)2004,JPO&NCIPI
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