APPARATUS AND METHOD FOR RECIRCULATING LIQUID DISPENSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for regulating backward flow in a recirculation path coupling a three-way dispensing module with a liquid distribution manifold. SOLUTION: In an apparatus for applying a liquid to a substrate, the dispensing module 14 and the manifold 12 are coupled together to provide a dispensing path for providing liquid from the manifold to the dispensing module for dispensing onto the substrate. A check valve positioned in the recirculation path ensures that liquid cannot flow from the recirculation path to the dispensing path when a dispensing valve of the dispensing module cycles from an open condition to a closed condition. This backward flow prevention improves the accuracy of dispensed volumes of liquid. COPYRIGHT: (C)2004,JPO&NCIPI