| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer device capable of extracting simply a component caused by birefringence from astigmatism of a lens and evaluating it quantitatively. SOLUTION: In this interferometer device, a wave plate driving device 22 and a stage driving device 23 constitutes a relative azimuth adjusting means for rotating a test lens ML or the polarization direction of linearly polarized light entering the lens, together with a partial function of a computer 27. A partial calculation function of the computer 27 constitutes a wave front calculation means for extracting a pair of astigmatic components. For example, since the astigmatic component on face deformation dependence and the astigmatic component on polarization direction dependence are extracted separately by calculation of a pair of astigmatic vectors measured before and after rotation of the test lens ML, the content of the astigmatism can be evaluated quantitatively, and the quality of aberration evaluation of the test lens ML can be improved. COPYRIGHT: (C)2004,JPO&NCIPI
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