| 摘要 |
<p>A vacuum device has a vacuum container with a gas inlet and a gas outlet, and a vacuum pump with plural stages of mechanically structured vacuum pumps for reducing the pressure inside the vacuum container and maintaining the pressure-reduced state. The vacuum device has an ejector pump (60) connected to a discharge port (57) of a screw pump (A) that is a vacuum pump at the last stage among the vacuum pumps. The vacuum device is used in the field of semiconductor manufacturing etc. and consumes less electric power.</p> |
