发明名称 BONDING METHOD AND DEVICE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide bonding method for efficiently mounting a mounting member on a substrate, and a device for the method. SOLUTION: An elastic member 6 is interposed between chips 4 and a head 12 so as to cover the plurality of arrayed chips 4 and is pressed from the upper part of the same by the head 12. In this case, the elastic member 6 absorbs the variety of thicknesses of each chips 4 and the chips 4 are pressed evenly, while only the rear surface part of the substrate, on which the chips 4 are mounted is heated by a heating means below the substrate 2 whereby resin is heated and cured. Accordingly, the plurality of chips 4 can be mounted simultaneously on the substrate 2 and a stress, given to the whole of the substrate, can be avoided. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004259917(A) 申请公布日期 2004.09.16
申请号 JP20030048731 申请日期 2003.02.26
申请人 TORAY ENG CO LTD 发明人 YAMAUCHI AKIRA
分类号 H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/52
代理机构 代理人
主权项
地址