发明名称 |
Pedestal/heater assembly lift mechanism with direct drive lead screw |
摘要 |
A new and improved lift mechanism which is suitably adapted for raising and lowering a pedestal/heater assembly inside a processing chamber for semiconductor wafer substrates. The pedestal/heater assembly lift mechanism includes a drive motor which is directly coupled through a shaft coupling to a threaded lead screw for rotating the lead screw in the clockwise or counterclockwise direction. The lead screw threadibly engages the pedestal/heater assembly for selectively raising and lowering the pedestal/heater assembly inside the processing chamber.
|
申请公布号 |
US2004179933(A1) |
申请公布日期 |
2004.09.16 |
申请号 |
US20030385762 |
申请日期 |
2003.03.11 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
HUANG KUO-HSI;HSIEH CHANG-YI;FAN YANG-HAI;HSU SHIH-CHANG;YU HAO-QUAN;TWU ZHENG-ZONG |
分类号 |
B65G49/07;(IPC1-7):B65G49/07 |
主分类号 |
B65G49/07 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|