摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron emitter material in which a minute protruding structural body (needle shape structure) is formed, and which has a superior electron emitting characteristic capable of arranging orientation, and its manufacturing method. <P>SOLUTION: This electron emitting element material is a needle shape structural body 15 having C=N bond obtained by controlling H/N radical density ratio and substrate temperature and by etching an organic material on the surface of which colloidal golds 14, 14, 14 are adhered by N-H series plasma. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |