| 摘要 |
An optical assembly (222) for directing and/or focusing a beam of light energy for an exposure apparatus (10) includes an optical housing (240) and one or more optical elements (242) that cooperate to form an optical cavity (270) having one or more stagnant flow areas (272). The optical assembly (222) also includes one or more flow diverters (246) for improving the flow a replacement fluid (250) in the stagnant flow areas (272) of the optical cavity (270) during purging of the optical assembly (222) with the replacement fluid (250).
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