| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an improved method of defect detection and reporting technique for detecting and differentiating defects of interest that are difficult to detect accurately, using current inspection techniques, while minimizing the reporting of non-defective areas reported as being defective. <P>SOLUTION: A number n of predetermined transforms are applied to both a data file 232, containing a copy of a standard and an image file 204 containing the copy of the standard so as to create a plurality of conditioned data files and a plurality of conditioned image files. A plurality of residual defect signals are extracted from these conditioned files. Thus, the plurality of residual defect signals are utilized, to identify the defects of interest in the copy of the standard and to report defects contained in one or more defect signals in the residual defect signals. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
