| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polarizing diffraction element which is hard to draw in bubbles into rugged gratings and which has stable optical characteristics as well as high reliability, and also to provide the manufacturing method. <P>SOLUTION: A double refracting film 3 is installed on a transparent substrate 1 through an adhesive layer 2 (a) to form a metallic film (A1)6 by vapor deposition of a metallic material (b). On the top of the metallic film, a photoresist pattern 7 is prepared (c), with which a metallic mask pattern 8 is made (d) to remove the photoresist pattern 7 (e). By using the metallic mask pattern 8, a periodic rugged grating is formed on the surface of the double refracting film 3 (f). The metallic mask pattern 8 (i.e., photoresist pattern 7) is made so that the projected part of the periodic rugged grating on the surface of the double refracting film 3 becomes more projected than the part other than the periodic rugged grating. Then, the metallic mask pattern 8 is removed (g), followed by overcoating on the rugged gratings of the double refracting film 3 (h), and dicing to individual polarizing diffraction elements (i). <P>COPYRIGHT: (C)2004,JPO&NCIPI |
