| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an ultraviolet region reflecting mirror which has a high reflection characteristic in the non-polarized state and also a strong metallic reflection film, and is easy to manufacture. SOLUTION: This method for manufacturing the ultraviolet region reflecting mirror by forming a metallic reflecting film made of a metallic material on a substrate 11 comprises: a 1st process for placing the substrate 11 in a vacuum container 21, and forming a getter film 12 consisting of a getter material 22 on the inner surface of the vacuum container 21 and on the surface of the substrate 11 to adsorb residual material in the vacuum container 21; and a 2nd process for forming a metallic reflecting film 23 on the surface of the getter film of the substrate 11 inside the vacuum container 21 which has adsorbed the residual material. COPYRIGHT: (C)2004,JPO&NCIPI
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