| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a triangular groove having superior shape precision, in particular a triangular groove which hardly exhibits shape abnormality at a groove apex part. SOLUTION: Disclosed are: a manufacturing method in which etching is stopped before a light transmission part is closed when a triangularly sectioned recessed part is formed in a high polymer film by partially etching the high polymer film by light irradiation through a projection mask having the light transmission part restricting an irradiation shape of light; a method for manufacturing an optical element where triangular grooves are repeatedly formed by the manufacturing method so that the grooves are distributed to exhibit the optical functions of a brazed diffraction grating, a light projecting means, etc; and a method for manufacturing an optical element in which a metal mold to which the surface shape wherein triangular grooves of the optical element are distributed is copied is obtained to transfer its surface shape to a high polymer layer. Even when a triangular groove having a steep slope is formed on a mask fixation method etc., a groove apex hardly takes an abnormal shape due to abnormal etching. COPYRIGHT: (C)2004,JPO&NCIPI
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