| 摘要 |
PROBLEM TO BE SOLVED: To provide a handler for testing a semiconductor element capable of performing quick and accurate temperature test for a semiconductor element in the environment at a specified temperature, high and low temperatures as well as normal temperature, with a simple configuration, without complex configuration as the entire handler. SOLUTION: The handler for testing a semiconductor element transports a semiconductor element and the like into a preset region for testing the semiconductor element. The handler is characterised by being provided with a loading part which holds a semiconductor element that is transported into the set region; an unloading part for receiving and housing the semiconductor element from the set region; a temperature adjusting part which selectively heats and/or cools the semiconductor element and the like to a preset temperature; a first transportation arrangement which selectively transports the semiconductor element to the loading part, the temperature adjusting part, or the unloading part; and a second transportation arrangement which selectively transports the semiconductor element to the set region or transports the semiconductor element and the like from the set region. COPYRIGHT: (C)2004,JPO&NCIPI
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