| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive temperature compensation circuit for a pressure sensor capable of reducing error of sensitivity and an offset. SOLUTION: A detection signal of a pressure sensor is corrected based on gradient compensation values DT3, DX3 determined by correcting a compensation value D1 for canceling the mean value H1 of a gradient component of the sensitivity or the temperature characteristic of the offset, by a gradient component at two optional temperatures of the pressure sensor, and on initial compensation values DZ3, DK3 determined by correcting an initial value S1 which is a variation of an intercept component to which a value is imparted so that a positive or negative deviation of the mean value H1 of the gradient component to the temperature characteristic becomes the same, by the magnitude of the detection signal at two optional temperatures of the pressure sensor. Even for one-dimensional compensation, a compensation which reflects temperature variation components of terms of multiple order can be given, and the error in the sensitivity or the offset can be reduced, so that the correction is inexpensive because a complicated circuit is not required. COPYRIGHT: (C)2004,JPO&NCIPI
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