| 摘要 |
PROBLEM TO BE SOLVED: To provide a drift angle measuring device and a method having high measurement accuracy by using a compact optical system. SOLUTION: This measuring device of the angle of deviation is constituted of a light source 1 for emitting measuring light, a lens 4 for condensing the measuring light emitted from the light source 1 to form a beam, a measuring object 2 where the measuring light enters to measure the angle of deviation, a light receiver 5 arranged on the optical axis of the beam-shaped measuring light, a light shielding plate 7 arranged on the front face on the light source side of the light receiver 5, a guide 8 to which the shielding plate 7 is fixed, a motor 9 for generating a power for moving the light shielding plate 7 in parallel with the light receiver 5 and recognizing the moving quantity, and a gear 10 fixed on the motor and engaged with planar teeth provided on the guide 8, for moving the light shielding plate 7. COPYRIGHT: (C)2004,JPO&NCIPI
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