| 摘要 |
PROBLEM TO BE SOLVED: To provide a visualizing method for particles, which has an adequate ability to observe airborne particles in its observation range, can make the size of adopted equipment minimum, and can get the adequate observation ability even in a place with a small space such as the inside of a clean apparatus. SOLUTION: In the visualizing method for airborne particles, a mirror 2a is reciprocatingly vibrated by using a mirror-type deflector 2, laser light entering the mirror 2a is deflected so as to irradiate the particles, and scattered light is received by using a camera 3. In the visualizing method for airborne particles, the absolute positions of the mirror 2a are correlated to voltage values applied to the mirror-type deflector 2, and the laser light is scanned at a uniform velocity by varying the voltage value. COPYRIGHT: (C)2004,JPO&NCIPI
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