发明名称 |
Novel thiol compound, copolymer and method for producing the copolymer |
摘要 |
By resolving objections in the prior art, provided are a novel copolymer suitable as a coating polymers which is excellent in adhesion to a substrate and can be used suitably as the polymer for the coating film having durability against pattern collapse in the finer pattern formation for progressed lithography technology and a method for producing the copolymer, as well as a novel thiol compound useful as a chain transfer agent in the production of the copolymer. The novel thiol compound of the present invention has the structure represented by the formula (1); wherein R<1 >is a bivalent substituent selected from linear, branched or cyclic saturated hydrocarbon having 1 to 15 carbon atoms.
|
申请公布号 |
US2004181023(A1) |
申请公布日期 |
2004.09.16 |
申请号 |
US20040784435 |
申请日期 |
2004.02.23 |
申请人 |
YAMAGISHI TAKANORI;MITA TAKAHITO |
发明人 |
YAMAGISHI TAKANORI;MITA TAKAHITO |
分类号 |
C07C323/12;C07C323/17;C08F2/38;G03F7/004;G03F7/039;G03F7/085;(IPC1-7):C08F118/02 |
主分类号 |
C07C323/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|