发明名称 Novel thiol compound, copolymer and method for producing the copolymer
摘要 By resolving objections in the prior art, provided are a novel copolymer suitable as a coating polymers which is excellent in adhesion to a substrate and can be used suitably as the polymer for the coating film having durability against pattern collapse in the finer pattern formation for progressed lithography technology and a method for producing the copolymer, as well as a novel thiol compound useful as a chain transfer agent in the production of the copolymer. The novel thiol compound of the present invention has the structure represented by the formula (1); wherein R<1 >is a bivalent substituent selected from linear, branched or cyclic saturated hydrocarbon having 1 to 15 carbon atoms.
申请公布号 US2004181023(A1) 申请公布日期 2004.09.16
申请号 US20040784435 申请日期 2004.02.23
申请人 YAMAGISHI TAKANORI;MITA TAKAHITO 发明人 YAMAGISHI TAKANORI;MITA TAKAHITO
分类号 C07C323/12;C07C323/17;C08F2/38;G03F7/004;G03F7/039;G03F7/085;(IPC1-7):C08F118/02 主分类号 C07C323/12
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