发明名称 SYSTEM FOR FABRICATING ELECTRICAL CIRCUITS EMPLOYING A FLUID FLOW SUPPORTER
摘要 A system and method for supporting a flat substrate during fabrication, employing a fluid flow supporter operating at a first fluid pressure and a first flow volume. A high pressure, low volume, fluid input is converted to reduce the pressure and increase the volume. The system and method are useful for levitating in-fabrication electrical circuits, such a flat panel displays, undergoing an electrical circuit fabrication operation.
申请公布号 WO2004079496(A2) 申请公布日期 2004.09.16
申请号 WO2004IL00201 申请日期 2004.03.02
申请人 ORBOTECH LTD.;SHIGERU, YAMAMOTO;ADIN, RAANAN 发明人 SHIGERU, YAMAMOTO;ADIN, RAANAN
分类号 B65G51/03;B65G49/06;G06F;H01L21/677;H01L21/68;H05K13/00 主分类号 B65G51/03
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