发明名称 |
SYSTEM FOR FABRICATING ELECTRICAL CIRCUITS EMPLOYING A FLUID FLOW SUPPORTER |
摘要 |
A system and method for supporting a flat substrate during fabrication, employing a fluid flow supporter operating at a first fluid pressure and a first flow volume. A high pressure, low volume, fluid input is converted to reduce the pressure and increase the volume. The system and method are useful for levitating in-fabrication electrical circuits, such a flat panel displays, undergoing an electrical circuit fabrication operation. |
申请公布号 |
WO2004079496(A2) |
申请公布日期 |
2004.09.16 |
申请号 |
WO2004IL00201 |
申请日期 |
2004.03.02 |
申请人 |
ORBOTECH LTD.;SHIGERU, YAMAMOTO;ADIN, RAANAN |
发明人 |
SHIGERU, YAMAMOTO;ADIN, RAANAN |
分类号 |
B65G51/03;B65G49/06;G06F;H01L21/677;H01L21/68;H05K13/00 |
主分类号 |
B65G51/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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