PRODUCTION METHOD OF SIC MONITOR WAFER,申请号KR20047012919-传众专利搜索

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发明名称	PRODUCTION METHOD OF SIC MONITOR WAFER
摘要
申请公布号	KR20040080004(A)	申请公布日期	2004.09.16
申请号	KR20047012919	申请日期	2003.01.10
申请人		发明人
分类号	H01L21/205;C23C16/01;C23C16/32;C30B25/02;C30B29/36;C30B33/00;C30B33/12;H01L21/02	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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