| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a simulation apparatus which enables a simulation to be executed in consideration for various parameters in CMP process. <P>SOLUTION: In a 2-dimensional occupancy distribution computation part 111, 2-dimensional distribution image DP of occupancy is obtained, and the mesh of measured data D2 is adjusted in a mesh adjustment part 112. In a height distribution computation part 113, computation of height distribution is performed based on the distribution image DP. In a correlation coefficient computation part 118, least square analysis of measured data D21 and height distribution data DP1 is performed and the correlation coefficient is calculated. The 2-dimensional distribution image DP turns to a 2-dimensional distribution image DPX of occupancy through a Fourier computation part 114, a spatial filter 115 and an inverse Fourier computation part 116. Further, height distribution data DP2 are obtained through the height distribution computation part 113. In the correlation coefficient computation part 118, least square analysis of height distribution data DP2 and measured data D2 after CMP process is performed, thereby calculating correlation coefficient. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
