| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method capable of efficiently and rapidly manufacturing a projection optical system which is well suppressed in a residual aberration and has excellent optical performance. SOLUTION: The manufacturing method manufactures the projection optical system (6) for projecting the image of a first surface (3) on a second surface (7). The method for manufacturing the projection optical system includes a first building process of building optical members into product split lens barrels, a second building process of building an optical member into temporary split lens barrels, an assembly process of assembling the projection optical system by using the product split lens barrels and the temporary split lens barrels, an aberration measuring process of measuring the aberration of the assembled projection optical system, an adjusting process of respectively independently adjusting the positions or postures of the optical members housed into the temporary split lens barrels in order to correct the measured aberration of the projection optical system, and a replacement process of taking the optical members out of the temporary split lens barrels undergoing the adjusting process out of the temporary split lens barrels and building the same into the corresponding product split lens barrels. COPYRIGHT: (C)2004,JPO&NCIPI |
