CERAMIC SUBSTRATE AND METHOD OF FORMING THIN FILM ON COARSE SURFACE OF CERAMIC SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a ceramic substrate capable of forming a thin film with good adhesion on the surface of the ceramic substrate even if ceramic portions and metallic portions are mixed up in the same plane. SOLUTION: The ceramic substrate comprises an AIN-made insulating substrate 2 and a metallic conductive layer 3, the surface roughness Ra1 of the insulating substrate 2 is determined to be 0.01μm to 5μm and the surface roughness Ra2 of the conductive layer 3 is determined to be 0.002μm to 2μm to allow the surface roughness Ra1 of the insulating substrate 2 to be bigger than that Ra2 of the conductive layer 3. COPYRIGHT: (C)2004,JPO&NCIPI