| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample stage driving mechanism realizing observation and measurement of the sample with high precision, of which, convergence of a drift is quickened and amount of the drift is reduced owing to repelling force generated on an O-ring. SOLUTION: On the sample stage driving mechanism composed of a hollow tube-shaped spherical surface receiving member having a spherical concave part fixed to a chamber, a rod-shaped sample holder having a spherical convex part sliding on the spherical surface, a sample stage located at a tip part of the sample holder, a driving motor driving the sample holder, and the O-ring for keeping the sample stage part in vacuum mounted on a ball-shaped fulcrum member, the drift after the movement of the stage is reduced. An elastic force generated at the O-ring for keeping the vacuum is efficiently utilized. By the above driving mechanism, an operability of an electron microscope is improved, and the measurement with high precision is made available. COPYRIGHT: (C)2004,JPO&NCIPI
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