VACUUM TYPE WASHING APPARATUS

摘要

PROBLEM TO BE SOLVED: To evade the performance deterioration or failure of a vacuum pump by preventing air bubbles of a washing liquid from reaching an evacuation line. SOLUTION: The subject vacuum type washing apparatus in which a washing vessel 10 is evacuated by the vacuum pump 32 connected to the washing vessel 10 and a material 20 to be washed which is dipped in the washing liquid 12 in the washing vessel 10 is vacuum-washed is provided with a foam detector 38 for detecting the foam 44 of the washing liquid 12 which is produced in the vacuum washing of the washing vessel 10 and a controller 46 for introducing the air in the washing vessel 10 based on the detected signal of the foam detector 38. As the foam detector 38, an electrode type level meter is preferably used. COPYRIGHT: (C)2004,JPO&NCIPI