| 发明名称 |
Ultra-high Q micro-resonator and method of fabrication |
| 摘要 |
A micro-cavity resonator including a micro-cavity capable of high and ultra-high Q values and a silicon substrate. Portions of the silicon substrate located below a periphery of the micro-cavity are removed to form a pillar, which supports the micro-cavity. Optical energy travels along an inner surface of the micro-cavity.
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| 申请公布号 |
US2004179573(A1) |
申请公布日期 |
2004.09.16 |
| 申请号 |
US20030678354 |
申请日期 |
2003.10.02 |
| 申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
ARMANI DENIZ K.;KIPPENBERG TOBIAS J.;SPILLANE SEAN M.;VAHALA KERRY J. |
| 分类号 |
G02B6/10;G02B6/12;G02B6/13;G02B6/136;G02B6/34;H01S3/05;H01S3/083;H01S5/10;(IPC1-7):H01S3/083 |
主分类号 |
G02B6/10 |
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