| 摘要 |
PROBLEM TO BE SOLVED: To detect an abnormality in a heat treatment with high accuracy. SOLUTION: The temperature of a heat treatment board 5 is estimated by receiving an operation quantity by using a model 16 corresponding to a normal heat treatment state, the difference between the estimated value and detected temperature of the board 5 actually detected by a temperature sensor 6 is obtained, the difference is squared and integrated to be compared with a threshold to detect the abnormality in the heat treatment, and the estimated value is subjected to be an estimated value in accordance with variations of a surrounding temperature or the like, so that the abnormality can be detected with high accuracy. COPYRIGHT: (C)2004,JPO&NCIPI
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