发明名称 |
Determining chromatic aberration in scanning microscope, by determining scan position at which detected light has power extremes, for multiple detection wavelengths |
摘要 |
<p>The method involves scanning a sample having reference structures using an illumination light beam, and detecting the light leaving the sample in dependence on the scan position at a detection wavelength or in a spectral range. The scan position is determined at which the detected light has power extremes. The light leaving the sample is detected at a further wavelength or spectral range, and further scan positions of power extremes are determined. The chromatic aberration is determined from the scan positions. An independent claim is included for a scanning microscope.</p> |
申请公布号 |
DE10309911(A1) |
申请公布日期 |
2004.09.16 |
申请号 |
DE2003109911 |
申请日期 |
2003.03.07 |
申请人 |
LEICA MICROSYSTEMS HEIDELBERG GMBH |
发明人 |
BORLINGHAUS, ROLF |
分类号 |
G02B21/00;(IPC1-7):G02B21/00 |
主分类号 |
G02B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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