发明名称 Coating installation for medium and small diameter optical components with curved surfaces, e.g. lenses, mirrors, etc. for photobjective lenses of consumer optics
摘要 <p>The coating installation comprises planetary system (1) for rotary motion of substrates (20) during coating. Planetary system contains main carrier (2), rotatable about main rotation axis (3), and number of substrate carriers (4) rotatable about substrate carrier axes (5), relative to main carrier. Substrate carriers are fitted in different radial spacing to main rotation axis, preferably on several concentric rings round main rotation axis, typically on two or three rings. There may be ten to thirty substrate carriers. INDEPENDENT CLAIM is included for planetary system.</p>
申请公布号 DE10308471(A1) 申请公布日期 2004.09.16
申请号 DE2003108471 申请日期 2003.02.20
申请人 HENSOLDT AG 发明人 HELLER, MATTHIAS
分类号 C23C14/50;(IPC1-7):C23C14/22;G02B1/10 主分类号 C23C14/50
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