摘要 |
<p>The coating installation comprises planetary system (1) for rotary motion of substrates (20) during coating. Planetary system contains main carrier (2), rotatable about main rotation axis (3), and number of substrate carriers (4) rotatable about substrate carrier axes (5), relative to main carrier. Substrate carriers are fitted in different radial spacing to main rotation axis, preferably on several concentric rings round main rotation axis, typically on two or three rings. There may be ten to thirty substrate carriers. INDEPENDENT CLAIM is included for planetary system.</p> |