| 摘要 |
PROBLEM TO BE SOLVED: To obtain an electrostatic driving liquid drop ejection head comprising a diaphragm constituting at least one wall of a liquid ejection chamber, and a counter electrode disposed oppositely to the diaphragm through a gap in which contact face between the diaphragm and the counter electrode is decreased by forming a protrusion on the surface of the diaphragm facing the counter electrode. SOLUTION: The liquid drop ejection head comprises a single or a plurality of nozzle holes 31 for ejecting liquid drops, the ejection chambers 21 communicating with respective nozzle holes 31, the diaphragm 16 constituting at least one wall of the liquid ejection chamber 21 and applied with a common electrode 11, and the counter electrode 3 disposed oppositely to the diaphragm 16 through the gap G. A part of the diaphragm 16 forms the protrusion 13 on the surface facing the counter electrode 3 where the gap G is formed by etching a sacrifice layer such that the protrusion 13 abuts against the counter electrode 3 side when the diaphragm 16 is attracted to the counter electrode 3 side by an electrostatic force, thus decreasing the contact area. COPYRIGHT: (C)2004,JPO&NCIPI
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