| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum film-forming apparatus for a film, which can prevent electrostatic charging, and to provide a plastic film having adequate characteristics of preventing defects due to discharge, with the use of the apparatus. SOLUTION: The vacuum film-forming apparatus for the film provided with at least an uncoiler, a film-forming unit and a recoiler, has a static eliminator arranged between the film-forming unit and the recoiler. The static eliminator is a plasma static eliminator, and on the rear surface of the film at the portion of the static eliminator, an electroconductive roll is preferably not arranged. COPYRIGHT: (C)2004,JPO&NCIPI
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