METHOD OF MANUFACTURING METAL OXIDE FILM

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a metal oxide film capable of crystallizing it at a low temperature and improving the crystallinity of the obtained film. SOLUTION: The metal oxide film is manufactured by fixing a metal oxide formed from a metal carboxylate and an alcohol or a metal compound containing an alkoxy group and a compound containing a carboxy group as starting materials on the surface of a substrate as a film, where the formation of the metal oxide is done in the presence of water. COPYRIGHT: (C)2004,JPO&NCIPI