Method of self-aligning an oxide aperture with an annular intra-cavity contact in a long wavelength VCSEL

摘要

A method of forming a vertical cavity surface emitting laser (100, 600, 900) includes process steps for self-aligning the p-type ohmic contact (118, 518, 932), an oxide current aperture (122, 926a), and a central puck of re-phase material (560a, 936) around the optical axis of the laser.