PROJECTION METHOD AND PROJECTION SYSTEM COMPRISING AN OPTICAL FILTERING PROCESS

摘要

According to the invention, an imaging system is used during the imaging of a pattern arranged in an object plane of an optical imaging system into the image plane of said imaging system, wherein a plurality of optical elements and at least one pupil plane are located between the object plane and the image plane, said pupil planes being Fourier-transformed into field planes of the imaging system. An angle-selective, optical filtering process is carried out in the region of the field planes by means of an optical filter element, the angle-dependent filter function of said filter element being calculated as a function of a desired fixed filter function for the region of the pupil.