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发明名称
A method and apparatus for infrared pyrometer calibration in a thermal processing system
摘要
申请公布号
EP0798547(B1)
申请公布日期
2004.09.15
申请号
EP19970301752
申请日期
1997.03.17
申请人
APPLIED MATERIALS, INC.
发明人
YAM, MARK
分类号
G01K15/00;G01J5/00;G01J5/02;G01J5/08;G01J5/52;H01L21/66;(IPC1-7):G01J5/52
主分类号
G01K15/00
代理机构
代理人
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