METHOD FOR FORMING AN INTEGRATED-CIRCUIT PATTERN,申请号UA20031212332-传众专利搜索

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发明名称	METHOD FOR FORMING AN INTEGRATED-CIRCUIT PATTERN
摘要
申请公布号	UA70053(A)	申请公布日期	2004.09.15
申请号	UA20031212332	申请日期	2003.12.25
申请人	V.E. LASHKARIOV INSTITUTE OF SEMICONDUCTOR PHYSICS OF THE NATIONAL ACADEMY OF SCIENCES OF UKRAINE	发明人	MASLOV VOLODYMYR PETROVYCH;SARSEMBAIEVA ANNA ZULKHAIRIVNA;SYZOV FEDIR FEDOROVYCH;TSYRKUNOV YURII YAKYMOVYCH
分类号	H05K3/02;H05K3/18;(IPC1-7):H05K3/02	主分类号	H05K3/02
代理机构		代理人
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