Micro-mirror device including dielectrophoretic liquid

摘要

A micro-mirror device includes a substrate (20) having a surface (22), and a plate (30) spaced from and oriented substantially parallel to the surface of the substrate such that the plate and the surface of the substrate define a cavity (50) therebetween. A dielectrophoretic liquid (53) capable of movement when an electrical signal is applied to the micro-mirror device is disposed in the cavity, and a reflective element is interposed between the surface of the substrate and the plate such that the reflective element (42) is adapted to move between a first position and at least one second position.