发明名称 Electrostatic driving device for a flexible thin film and manufacturing method of the same
摘要 An electrostatic driving device according to the present invention has a flexible thin film (4), a holding member (3), which holds the flexible thin film and allows the flexible thin film to bend, a function member (6) disposed on the flexible thin film, a film-side facing electrode (5a) disposed on the flexible thin film, a base (7), which faces the holding member, a base-side facing electrode (8), which is disposed on the base and faces the film-side facing electrode; and a bonding spacer member (13, 14), which is held between the holding member and base, bonds the holding member to the base, and holds an interval between the holding member and base at a predetermined interval so as to keep an electrode interval between the film-side facing electrode and base-side facing electrode at a predetermined interval. <IMAGE>
申请公布号 EP1457804(A1) 申请公布日期 2004.09.15
申请号 EP20040004994 申请日期 2004.03.03
申请人 OLYMPUS CORPORATION 发明人 HATAKEYAMA, TOMOYUKI;HORIUCHI, KATSUJI
分类号 G02B26/00;B81B3/00;B81C3/00;G02B5/08;G02B5/10;G02B26/08;H02N1/00;(IPC1-7):G02B26/08 主分类号 G02B26/00
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