发明名称 |
ANLAGE ZUR NASSBEHANDLUNG VON SUBSTRATEN |
摘要 |
In a device for the wet treatment of substrates (3) in a container (1), containing a treatment fluid (2), whereby the substrates (3) are introduced into the container (1) with a substrate carrier (5), an optimal alignment and centering of the substrates (3) will result within the container (1) upon lifting from the container (1) with the aid of a substrate receiving device (4) provided within the container (1). |
申请公布号 |
AT274237(T) |
申请公布日期 |
2004.09.15 |
申请号 |
AT19970915451T |
申请日期 |
1997.03.27 |
申请人 |
STEAG MICROTECH GMBH |
发明人 |
WEBER, MARTIN;MEISTER, DIETER;WEHRLE, FELIX;FUNKHAENEL, JUERGEN |
分类号 |
B08B3/04;B65G49/04;H01L21/00;H01L21/304;H01L21/677 |
主分类号 |
B08B3/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|