发明名称 ANLAGE ZUR NASSBEHANDLUNG VON SUBSTRATEN
摘要 In a device for the wet treatment of substrates (3) in a container (1), containing a treatment fluid (2), whereby the substrates (3) are introduced into the container (1) with a substrate carrier (5), an optimal alignment and centering of the substrates (3) will result within the container (1) upon lifting from the container (1) with the aid of a substrate receiving device (4) provided within the container (1).
申请公布号 AT274237(T) 申请公布日期 2004.09.15
申请号 AT19970915451T 申请日期 1997.03.27
申请人 STEAG MICROTECH GMBH 发明人 WEBER, MARTIN;MEISTER, DIETER;WEHRLE, FELIX;FUNKHAENEL, JUERGEN
分类号 B08B3/04;B65G49/04;H01L21/00;H01L21/304;H01L21/677 主分类号 B08B3/04
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