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发明名称
摘要
申请公布号
JP3565311(B2)
申请公布日期
2004.09.15
申请号
JP19970364442
申请日期
1997.12.17
申请人
发明人
分类号
H05H1/46;C23C16/44;C23F4/00;H01J37/32;H01L21/205;(IPC1-7):H05H1/46
主分类号
H05H1/46
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代理人
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地址
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