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发明名称
Verfahren zur Korrektur des axialen Astigmatismus von korpuskularstrahloptischen,insbesondere elektronenoptischen Linsen unter Verwendung eines einstellbaren Stigmators
摘要
申请公布号
DE1514588(A1)
申请公布日期
1969.05.14
申请号
DE19651514588
申请日期
1965.09.28
申请人
SIEMENS AG
发明人
GERHARD KEMPF,DIPL.-PHYS.
分类号
H01J37/153
主分类号
H01J37/153
代理机构
代理人
主权项
地址
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