| 摘要 |
A probe device is provided which solves a problem of connection between vertical probes assembled at a narrow pitch and connection terminals formed on a printed circuit board at a coarse pitch. For this purpose, the probe device comprises: a probe assembly made up of a plurality of regularly arrayed vertical probes; a flexible flat cable having metal lines formed and bonded to a surface of a nonconductive flexible film; and a fixing device for fixing one end of the flexible flat cable; wherein metal line terminals formed at the one end of the flexible flat cable secured to the fixing device are put in contact with the probe assembly, metal line terminals formed at the other end of the flexible flat cable are connected to a printed circuit board, and the semiconductor chip to be inspected and the printed circuit board are electrically connected together through the probe assembly and the flexible flat cable. |
