System and method of continuous deposition of insulating material using multiple anodes alternated between positive and negative voltages

摘要

A method an and apparatus are disclosed for sputter deposition of a cathode material on a substrate (3) in a continuous mode of operation. A novel design for an anode assembly and driving power supply is disclosed to permit this. Single or multiple anodes (11 and 12) are used, which at any given time may be biased negatively with respect to the plasma (2), so that any cathode material which may have been deposited thereupon may be sputtered away so as to provide a clean positive anode to the system, and at least for some period of time is biased positively so that it acts as an anode. The removal of any insulating material which may have formed on the anode structure permits its continuing effective use in collecting electrons from the plasma when it is biased positively, and therefore its continuing effective use as an anode for the system, permitting continuous operation of the system.