发明名称 Method for fabricating semiconductor device
摘要 Formed first is a template having openings located to correspond to a pattern in which a plurality of semiconductor laser elements are to be arranged. Then, the template is held on the principal surface of a mounting wafer onto which the semiconductor elements are to be arranged. Subsequently, the semiconductor laser elements are dispersed into a fluid, and the semiconductor-laser-element-dispersed fluid is poured over the wafer on which the template is held. In this manner, the semiconductor laser elements are disposed into the respective openings of the template in a self-aligned manner.
申请公布号 US6790692(B2) 申请公布日期 2004.09.14
申请号 US20030602000 申请日期 2003.06.24
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 ONOZAWA KAZUTOSHI
分类号 G11B7/125;H01L21/70;H01L21/98;H01L25/075;H01S5/022;(IPC1-7):H01L21/00 主分类号 G11B7/125
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