发明名称 Actuator and transducer
摘要 An actuator comprises a magnet yoke and a carrier member movable relative to the magnet yoke. The magnet yoke has at least one permanent magnet and the carrier member is positioned in the magnetic field produced by this magnet. The carrier member has an auxiliary magnetic member that produces a relative bias force between the carrier member and the magnet yoke. The bias force will be used to compensate for a weight applied to the device and acts as a bearing with a very large compliance. The carrier member also comprises a coil. Passing current through the coil produces a Lorentz force for further control of the actuator; alternatively, the device provides a velocity transducer by sensing the EMF generated in the coil by relative motion of the carrier member and magnet yoke.
申请公布号 US6791443(B2) 申请公布日期 2004.09.14
申请号 US20030704972 申请日期 2003.11.12
申请人 ASML NETHERLANDS B.V. 发明人 LOOPSTRA ERIK R.
分类号 H01J37/305;G03F7/20;H01L21/027;H01L21/68;H02K33/18;H02K41/02;H02K41/035;H02N15/00;(IPC1-7):H01F7/08 主分类号 H01J37/305
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