| 摘要 |
The present invention generally relates to a dual damascene processing method using a silicon rich oxide (SRO) layer thereof and its structure. In the dual damascene process, a first dielectric layer, an etching stop layer, such as a silicon rich oxide layer, and a second dielectric layer are sequentially formed on a semiconductor substrate, which is provided with metal connections therein. Then, the present invention utilizes photolithography and etching technique to obtain a dual damascene structure profile having a trench and a via hole. The present invention uses the silicon rich oxide layer as the etching stop layer so as the present invention can achieve a better trench microloading and better bottom profile. Beside, the present invention does not increase the dielectric constant index (K) of the inter metal dielectric (IMD).
|
