发明名称 |
Integrated laser oscillator-amplifier system |
摘要 |
The present invention contemplates an integrated oscillator-amplifier system for deep UV generation. The system employs a long cavity oscillator to lengthen the pulse build-up time and to control the pulse spectral bandwidth. Meanwhile the system employs a short cavity amplifier to shorten the energy extraction time to produce a single short pulse with good energy extraction efficiency. The system further integrates the oscillator and the amplifier by inserting the amplifier cavity inside the oscillator cavity via a mirror of low reflectivity. As a result, the integrated system has a long build-up time to generate a seed pulse in the long cavity oscillator and has a short energy extraction time to generate a short amplified single pulse in the short cavity. Consequently, the integrated system can accommodate a relatively long pump pulse to produce a single short amplified pulse suitable for deep UV laser generation.
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申请公布号 |
US6792027(B2) |
申请公布日期 |
2004.09.14 |
申请号 |
US20030385961 |
申请日期 |
2003.03.10 |
申请人 |
LAI MING;MOHEBI MEHRDAD;QU ZHIMIN |
发明人 |
LAI MING;MOHEBI MEHRDAD;QU ZHIMIN |
分类号 |
H01S3/00;H01S3/05;H01S3/082;H01S3/102;H01S3/23;(IPC1-7):H01S3/10;H01S3/13;H01S3/093;H01S3/08 |
主分类号 |
H01S3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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