AMINOALCOHOL COMPOUND LIGAND, METAL COMPLEX USING THE LIGAND AND PREPARATION METHOD FOR GROWING METAL OR METAL OXIDE THIN FILM BY USING THE COMPLEX AS A PRECURSOR

摘要

PURPOSE: An aminoalcohol compound, its preparation method, a metal complex prepared by using the compound, its preparation method and a method for growing a metal or metal oxide thin film by using the complex as a precursor are provided, to improve the thermal stability and volatility of a metal complex, thereby enhancing the quality of a thin film obtained by using the complex. CONSTITUTION: The aminoalcohol compound is represented by the formula 1 or 2, wherein Rs are independently an alkyl or alkoxyalkyl group of C1-C4 containing or not containing F; R' is an alkyl group of C1-C4 containing or not containing F, Si(CH3)3 or H; R''s are independently an alkyl group of C1-C4 containing or not containing F; and m and n are a number of 1-3. The metal complex is represented by M(OR)y, wherein M is a metal selected from the group consisting of an alkaline earth metal, a transition metal and a lanthanide metal; R is an alkyl or alkoxyalkyl group of C1-C4 containing or not containing F; and y is a number of 2-6.