发明名称 Photo detector with passivation layer and antireflection layer made of the same material
摘要 An optical semiconductor device includes: a photo detector section which includes: a first semiconductor layer of a first conductivity type formed on a surface of a semiconductor substrate of the first conductivity type, a second semiconductor layer of a second conductivity type formed on a surface of the first semiconductor layer, and an antireflection film formed on a surface of the second semiconductor layer and preventing reflection of incident light; and a circuit element section which includes: a circuit element formed on the second semiconductor layer on the semiconductor substrate, and a passivation film covering an uppermost electrode layer among electrode layers constituting the circuit element and formed out of a same material as a material of the antireflection film.
申请公布号 US6791153(B2) 申请公布日期 2004.09.14
申请号 US20020320684 申请日期 2002.12.17
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KASHIURA YUKIKO
分类号 H01L27/14;H01L21/331;H01L27/10;H01L27/144;H01L27/146;H01L29/732;H01L31/0216;H01L31/10;H01L31/103;H01L31/105;H01L31/18;(IPC1-7):H01L31/075 主分类号 H01L27/14
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